Invention Grant
- Patent Title: Laterally excited bulk wave device with acoustic mirror
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Application No.: US17108879Application Date: 2020-12-01
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Publication No.: US11463065B2Publication Date: 2022-10-04
- Inventor: Rei Goto
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/58 ; H03H9/205
Abstract:
A laterally excited bulk acoustic wave device is disclosed. The laterally excited bulk acoustic wave device can include a support substrate, a solid acoustic mirror on the support substrate, a piezoelectric layer on the solid acoustic mirror, and an interdigital transducer electrode on the piezoelectric layer. The interdigital transducer electrode is arranged to laterally excite a bulk acoustic wave.
Public/Granted literature
- US20210167753A1 LATERALLY EXCITED BULK WAVE DEVICE WITH ACOUSTIC MIRROR Public/Granted day:2021-06-03
Information query
