Invention Grant
- Patent Title: Fluid viscosity measuring device
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Application No.: US16735899Application Date: 2020-01-07
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Publication No.: US11467077B2Publication Date: 2022-10-11
- Inventor: Chang Han Je , Yil Suk Yang , Hyunjoong Lee
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2019-0004873 20190114
- Main IPC: G01N11/16
- IPC: G01N11/16 ; H01L41/113 ; H01L41/053

Abstract:
Provided is a fluid viscosity measuring device including a support structure having an opening part, the opening part penetrating the support structure in a first direction, a driving resonator fixed to the support structure and extending to overlap the opening part, and a detection resonator fixed to the support structure and extending parallel to the driving resonator, the detection resonator being spaced apart from the driving resonator in the first direction. The driving resonator includes a first piezoelectric body. The detection resonator includes a second piezoelectric body. The first piezoelectric body and the second piezoelectric body have the same shape.
Public/Granted literature
- US20200225138A1 FLUID VISCOSITY MEASURING DEVICE Public/Granted day:2020-07-16
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