Conveyance apparatus, production system, and method for manufacturing article
摘要:
A conveyance apparatus includes a mover, a stator, and a control unit. The mover moves along a first direction. The stator includes a plurality of first sensors arranged along the first direction. Each of the plurality of first sensors can detect position information about the mover. The control unit corrects the position information about the mover and controls a position and/or orientation of the mover based on at least one of a relative position between at least one of the plurality of first sensors and the mover. The relative position is obtained by (a) detection values of the plurality of first sensors and/or (b) detection times in which the plurality of first sensors each detect the position information about the mover.
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