Invention Grant
- Patent Title: Switch matrix design for beam image system
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Application No.: US16648385Application Date: 2018-09-14
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Publication No.: US11476085B2Publication Date: 2022-10-18
- Inventor: Yongxin Wang , Zhonghua Dong , Rui-Ling Lai
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- International Application: PCT/EP2018/074834 WO 20180914
- International Announcement: WO2019/053174 WO 20190321
- Main IPC: G01J1/00
- IPC: G01J1/00 ; H01J37/244 ; H01L27/146

Abstract:
Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
Public/Granted literature
- US20200227229A1 SWITCH MATRIX DESIGN FOR BEAM IMAGE SYSTEM Public/Granted day:2020-07-16
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