Invention Grant
- Patent Title: Spatial wafer processing with improved temperature uniformity
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Application No.: US17002409Application Date: 2020-08-25
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Publication No.: US11479855B2Publication Date: 2022-10-25
- Inventor: Joseph AuBuchon , Sanjeev Baluja , Dhritiman Subha Kashyap , Jared Ahmad Lee , Tejas Ulavi , Michael Rice
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; H01L21/67 ; H01L21/687 ; C23C16/46 ; H01L21/02

Abstract:
Apparatus and methods to process one or more wafers are described. A processing chamber comprises a first processing station comprising a first gas injector having a first face, a first emissivity and a first temperature, a second processing station comprising a second gas injector having a second face, a second emissivity and a second temperature, and a substrate support assembly comprising a plurality of substantially coplanar support surfaces, the substrate support assembly configured to move the support surfaces between the first processing station and the second processing station. When a wafer is on the support surfaces, a temperature skew of less than about 0.5° C. is developed upon moving the wafer between the stations in about 0.5 seconds.
Information query
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