- 专利标题: Mechanical resonator device
-
申请号: US16322645申请日: 2017-08-01
-
公开(公告)号: US11486756B2公开(公告)日: 2022-11-01
- 发明人: Albert Schliesser , Yeghishe Tsaturyan , Eugene Simon Polzik , Andreas Barg
- 申请人: Albert Schliesser
- 申请人地址: DK Copenhagen V
- 专利权人: Albert Schliesser
- 当前专利权人: Albert Schliesser
- 当前专利权人地址: DK Copenhagen V
- 代理机构: Nixon Peabody LLP
- 国际申请: PCT/EP2017/069402 WO 20170801
- 国际公布: WO2018/024713 WO 20180208
- 主分类号: G01G3/16
- IPC分类号: G01G3/16 ; G01L1/10
摘要:
A mechanical resonator device. The resonator device includes a resonator element made of an elastic material under tensile stress and adapted for sustaining at least one oscillation mode; and a clamping structure supporting the resonator element. The clamping structure has a phononic density of states exhibiting a bandgap or quasi-bandgap such that elastic waves of at least one polarisation and/or frequency are not allowed to propagate through the clamping structure. The resonator element and the clamping structure are configured to match with a soft-clamping condition that elastic waves of polarisation and/or frequency corresponding to the at least one oscillation mode of the resonator penetrate evanescently into the clamping structure in a manner such as to minimize bending throughout the entire resonator device. Thereby, bending related loss may be minimized and the Q-factor of the mechanical resonator may be maximized.
公开/授权文献
- US20210381877A1 MECHANICAL RESONATOR DEVICE 公开/授权日:2021-12-09
信息查询