Invention Grant
- Patent Title: Ellipsometer
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Application No.: US17350987Application Date: 2021-06-17
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Publication No.: US11493322B2Publication Date: 2022-11-08
- Inventor: Yasuhiro Hidaka
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: JPJP2020-115685 20200703
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B5/30 ; G02B27/28 ; G01N21/21 ; G01B11/06

Abstract:
An ellipsometer includes a first separation unit configured to separate a first reflected light into two reflected lights, a first polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, a first interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other, a second separation unit configured to separate a second reflected light into two reflected lights, a second polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, and a second interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other.
Public/Granted literature
- US20220003535A1 ELLIPSOMETER Public/Granted day:2022-01-06
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