Invention Grant
- Patent Title: Channel and body region formation for semiconductor devices
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Application No.: US16943569Application Date: 2020-07-30
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Publication No.: US11495604B2Publication Date: 2022-11-08
- Inventor: Si-Woo Lee , Haitao Liu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/10

Abstract:
Systems, methods and apparatus are provided for forming layers of a first dielectric material, a semiconductor material, and a second dielectric material in repeating iterations vertically to form a vertical stack and forming a vertical opening using an etchant process to expose vertical sidewalls in the vertical stack. A seed material that is selective to the semiconductor material is deposited over the vertical stack and the vertical sidewalls in the vertical stack and the seed material is processed such that the seed material advances within the semiconductor material such that it transforms a crystalline structure of a portion of the semiconductor material.
Public/Granted literature
- US20220037466A1 CHANNEL AND BODY REGION FORMATION FOR SEMICONDUCTOR DEVICES Public/Granted day:2022-02-03
Information query
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