Invention Grant
- Patent Title: Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with particulate contamination and corresponding methods
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Application No.: US16262264Application Date: 2019-01-30
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Publication No.: US11498934B2Publication Date: 2022-11-15
- Inventor: Benjamin L. Clark , Dominick Smiddy , Mark Geniza , Craig M. Gates
- Applicant: Inpria Corporation
- Applicant Address: US OR Corvallis
- Assignee: Inpria Corporation
- Current Assignee: Inpria Corporation
- Current Assignee Address: US OR Corvallis
- Agency: Christensen, Fonder, Dardi & Herbert PLLC
- Agent Diane E. Bennett; Peter S. Dardi
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07F7/22 ; G03F7/20
Abstract:
The purification of monoalkyl tin trialkoxides and monoalkyl tin triamides are described using fractional distillation and/or ultrafiltration. The purified compositions are useful as radiation sensitive patterning compositions or precursors thereof. The fractional distillation process has been found to be effective for the removal of metal impurities down to very low levels. The ultrafiltration processes have been found to be effective at removal of fine particulates. Commercially practical processing techniques are described.
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