Invention Grant
- Patent Title: Substrate supports including metal-ceramic interfaces
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Application No.: US16697472Application Date: 2019-11-27
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Publication No.: US11499229B2Publication Date: 2022-11-15
- Inventor: Chidambara A. Ramalingam , Juan Carlos Rocha , Joseph M. Polese , Katty Marie Lydia Gamon Guyomard , Jian Li
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C23C16/458
- IPC: C23C16/458 ; H01J37/32 ; H01L21/683

Abstract:
Embodiments of the present disclosure generally relate to substrate support assemblies used in semiconductor device manufacturing. In one embodiment, a substrate support includes a ceramic body having at least one aperture formed therein defined by a sidewall. A plurality of recesses extend into the sidewall, a rod member is disposed in the at least one aperture, and an eyelet member is circumferentially disposed about the rod member. The eyelet member has a plurality of protrusions extending outwardly therefrom, each disposed in a corresponding recess of the plurality of recesses. A first portion of each protrusion is in contact with a sidewall of the respective recess of the ceramic body and a second portion of each protrusion is separated by a gap from the sidewall of the respective recess of the ceramic body. A first portion of a brazing material is disposed between an upper surface of the at least one aperture and an end of the rod member.
Public/Granted literature
- US20200173017A1 SUBSTRATE SUPPORTS INCLUDING METAL-CERAMIC INTERFACES Public/Granted day:2020-06-04
Information query
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