- 专利标题： In situ thermal control of Langmuir-Schaefer transfer
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申请号： US16904716申请日： 2020-06-18
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公开(公告)号： US11508917B2公开(公告)日： 2022-11-22
- 发明人: Shelley A. Claridge , Tyler Hayes , David McMillan
- 申请人： Purdue Research Foundation
- 申请人地址： US IN West Lafayette
- 专利权人： Purdue Research Foundation
- 当前专利权人： Purdue Research Foundation
- 当前专利权人地址： US IN West Lafayette
- 代理机构： Purdue Research Foundation
- 主分类号： H01L51/00
- IPC分类号： H01L51/00 ; B05D1/20
摘要：
This invention generally relates to a method for preparing and transferring a monolayer or thin film. In particular this present invention is an improved version of the Langmuir-Schaefer technique for preparing and transferring a monolayer or thin film, incorporating in situ thermal control of the substrate during the transfer process.
公开/授权文献
- US20200321542A1 IN SITU THERMAL CONTROL OF LANGMUIR-SCHAEFER TRANSFER 公开/授权日：2020-10-08