A method of making a prelithiated anode for use in a lithium-ion battery includes providing a current collector having an electrically conductive layer and a metal oxide layer overlaying the electrically conductive layer. The metal oxide layer has an average thickness of at least 0.01 μm. A continuous porous lithium storage layer is deposited onto the metal oxide layer by a CVD process. Lithium is incorporated into the continuous porous lithium storage layer to form a lithiated storage layer prior to a first electrochemical cycle when the anode is assembled into the battery. The anode may be incorporated into a lithium ion battery along with a cathode. The cathode may include sulfur or selenium and the anode may be prelithiated.