Provided are a microfluidic apparatus, a method and system for introducing a substance into a cell. The microfluidic apparatus includes a cavity channel, a bulk wave generating device and a surface acoustic wave generating device; a microstructure is arranged on an inner wall of the cavity channel, and the microstructure is constructed for forming a bubble by a solution at the microstructure when the solution is injected into the cavity channel; the bulk wave generating device is configured to generate a bulk wave, the bulk wave enables the bubble to resonate for generating a flow field; and the surface acoustic wave generating device is configured to generate a surface acoustic wave and control a position of at least one particle in the solution.