Invention Grant
- Patent Title: Capacitance fine tuning by fin capacitor design
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Application No.: US17149006Application Date: 2021-01-14
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Publication No.: US11515247B2Publication Date: 2022-11-29
- Inventor: Nosun Park , Changhan Hobie Yun , Daniel Daeik Kim , Sameer Sunil Vadhavkar , Paragkumar Ajaybhai Thadesar
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Qualcomm Incorporated
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H01L21/70 ; H01L27/01

Abstract:
A device includes a main capacitor composed of a first plate of a first back-end-of-line (BEOL) metallization layer, a main insulator layer on the first plate, and a second plate on the main insulator layer. The second plate is composed of a second BEOL metallization layer. The device includes a first tuning capacitor of a first portion of a first BEOL interconnect trace coupled to the first plate of the main capacitor through first BEOL sideline traces. The first tuning capacitor is composed of a first insulator layer on a surface and sidewalls of the first portion of the first BEOL interconnect trace. The first tuning capacitor includes a second BEOL interconnect trace on a surface and sidewalls of the first insulator layer. The device includes a first via capture pad coupled to the second BEOL interconnect trace of the first tuning capacitor.
Public/Granted literature
- US20220223516A1 CAPACITANCE FINE TUNING BY FIN CAPACITOR DESIGN Public/Granted day:2022-07-14
Information query
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