Invention Grant
- Patent Title: Mechanism for selective coupling in microelectromechanical systems inertial sensors
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Application No.: US16906484Application Date: 2020-06-19
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Publication No.: US11519726B2Publication Date: 2022-12-06
- Inventor: Jeffrey A. Gregory , Laura Cornelia Popa
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C19/5769
- IPC: G01C19/5769 ; G01C19/5733

Abstract:
Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.
Public/Granted literature
- US20210396520A1 MECHANISM FOR SELECTIVE COUPLING IN MICROELECTROMECHANICAL SYSTEMS INERTIAL SENSORS Public/Granted day:2021-12-23
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