Invention Grant
- Patent Title: Package structures with built-in EMI shielding
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Application No.: US17098597Application Date: 2020-11-16
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Publication No.: US11521937B2Publication Date: 2022-12-06
- Inventor: Steven Verhaverbeke , Han-Wen Chen , Giback Park , Chintan Buch
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/538 ; H01L23/532 ; H01L25/065

Abstract:
The present disclosure relates to thin-form-factor semiconductor packages with integrated electromagnetic interference (“EMI”) shields and methods for forming the same. The packages described herein may be utilized to form high-density semiconductor devices. In certain embodiments, a silicon substrate is laser ablated to include one or more cavities and a plurality of vias surrounding the cavities. One or more semiconductor dies may be placed within the cavities and thereafter embedded in the substrate upon formation of an insulating layer thereon. A plurality of conductive interconnections are formed within the vias and may have contact points redistributed to desired surfaces of the die-embedded substrate assembly. Thereafter, an EMI shield is plated onto a surface of the die-embedded substrate assembly and connected to ground by at least one of the one or more conductive interconnections. The die-embedded substrate assembly may then be singulated and/or integrated with another semiconductor device.
Public/Granted literature
- US20220157740A1 PACKAGE STRUCTURES WITH BUILT-IN EMI SHIELDING Public/Granted day:2022-05-19
Information query
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