Invention Grant
- Patent Title: IC product comprising an insulating gate separation structure positioned between end surfaces of adjacent gate structures
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Application No.: US16523340Application Date: 2019-07-26
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Publication No.: US11522068B2Publication Date: 2022-12-06
- Inventor: Jiehui Shu , Chang Seo Park , Shimpei Yamaguchi , Tao Han , Yong Mo Yang , Jinping Liu , Hyuck Soo Yang
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L27/088 ; H01L21/84

Abstract:
One illustrative IC product disclosed herein includes first and second final gate structures and an insulating gate separation structure positioned between the first and second final gate structures. In one embodiment, the insulating gate separation structure has a stepped bottom surface with a substantially horizontally oriented bottom central surface that is surrounded by a substantially horizontally oriented recessed surface, wherein the substantially horizontally oriented bottom central surface is positioned a first level above the substrate and the substantially horizontally oriented recessed surface is positioned at a second level above the substrate, wherein the second level is greater than the first level.
Public/Granted literature
Information query
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