- 专利标题: Semiconductor device, method of fabricating the same, and display device including the same
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申请号: US16826926申请日: 2020-03-23
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公开(公告)号: US11527642B2公开(公告)日: 2022-12-13
- 发明人: Jinjoo Park , Junhee Choi , Kiho Kong , Joohun Han , Nakhyun Kim , Junghun Park
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2019-0124776 20191008
- 主分类号: H01L29/778
- IPC分类号: H01L29/778 ; H01L29/66 ; H01L27/15 ; H01L27/12
摘要:
A semiconductor device includes a substrate including a first region and a second region adjacent to the first region, the first and the second regions being disposed in a first direction parallel to an upper surface of the substrate; an etch-stop layer disposed on the first region and the second region; a separation layer disposed on an upper portion of the etch-stop layer, the separation layer being disposed on the first region; a high-electron-mobility transistor (HEMT) element disposed on an upper portion of the separation layer in a second direction perpendicular to an upper surface of the substrate; a light-emitting element disposed on the second region between the substrate and the etch-stop layer; and a plurality of first insulating patterns covering side surfaces of the HEMT element, the plurality of first insulating patterns extending to the etch-stop layer.
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