Invention Grant
- Patent Title: Laser crystallizing apparatus
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Application No.: US17235178Application Date: 2021-04-20
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Publication No.: US11532476B2Publication Date: 2022-12-20
- Inventor: Akifumi Sangu , Gyoowan Han , Jekil Ryu , Kyungjae Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0166165 20171205
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G02B27/28 ; G01J1/42 ; G02B27/10 ; B23K26/064 ; H01L27/12 ; B23K26/067 ; H01L21/67 ; B23K26/03 ; B23K26/08 ; B23K26/70 ; B23K26/352 ; B23K26/06 ; B23K26/354 ; B23K26/00 ; B23K101/40 ; B23K103/00

Abstract:
A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.
Public/Granted literature
- US20210257215A1 LASER CRYSTALLIZING APPARATUS Public/Granted day:2021-08-19
Information query
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