Invention Grant
- Patent Title: Channel formation for vertical three dimensional (3D) memory
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Application No.: US17004917Application Date: 2020-08-27
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Publication No.: US11532630B2Publication Date: 2022-12-20
- Inventor: Kamal M. Karda , Haitao Liu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C8/14

Abstract:
Systems, methods and apparatus are provided for depositing alternating layers of dielectric material and sacrificial material in repeating iterations to form a vertical stack, forming a plurality of vertical openings through the vertical stack to form elongated vertical, pillar columns with sidewalls in the vertical stack, patterning the pillar columns to expose a location to form a channel region, selectively removing a portion of the sacrificial material to form first horizontal openings in the first horizontal direction in the sidewalls of the elongated vertical, pillar columns, and depositing a channel material in the first horizontal openings to form the channel region within the sidewalls for the horizontally oriented access devices.
Public/Granted literature
- US20220068927A1 CHANNEL FORMATION FOR VERTICAL THREE DIMENSIONAL (3D) MEMORY Public/Granted day:2022-03-03
Information query
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