Invention Grant
- Patent Title: Metal insulator semiconductor (MIS) contact in three dimensional (3D) vertical memory
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Application No.: US17007327Application Date: 2020-08-31
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Publication No.: US11538809B2Publication Date: 2022-12-27
- Inventor: Kamal M. Karda , Deepak Chandra Pandey , Litao Yang , Srinivas Pulugurtha , Yunfei Gao , Haitao Liu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/06 ; H01L29/423 ; H01L29/786 ; H01L29/66 ; H01L49/02 ; H01L21/02

Abstract:
Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices having a first source/drain region and a second source drain region separated by a channel region, and gates opposing the channel region, vertically oriented access lines coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the second source/drain region and horizontally oriented digit lines coupled to the first source/drain regions. In one example, an insulator material is formed on a surface of the first source/drain region and a conductor material formed on the insulator material to form a metal insulator semiconductor (MIS) interface between the horizontally oriented digit lines and the first source/drain regions of the horizontally oriented access devices.
Public/Granted literature
- US20220068929A1 METAL INSULATOR SEMICONDUCTOR (MIS) CONTACT IN THREE DIMENSIONAL (3D) VERTICAL MEMORY Public/Granted day:2022-03-03
Information query
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