Invention Grant
- Patent Title: Frequency conversion using stacked strontium tetraborate plates
-
Application No.: US17553705Application Date: 2021-12-16
-
Publication No.: US11543732B2Publication Date: 2023-01-03
- Inventor: Yung-Ho Alex Chuang , Yinying Xiao-Li , Elena Loginova , John Fielden , Baigang Zhang
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: G02F1/355
- IPC: G02F1/355 ; G02F1/35

Abstract:
An optical element includes Strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency converting stage of a laser assembly to generate laser output light having a wavelength in the range of 125 nm to 183 nm. One or more fundamental light beams having fundamental wavelengths between 1 and 1.1 μm are doubled and/or summed using multiple intermediate frequency conversion stages to generate one or more intermediate light beam frequencies (e.g., second through eighth harmonics, or sums thereof), and then the final frequency converting stage utilizes the optical element to either double a single intermediate light beam frequency or to sum two intermediate light beam frequencies to generate the desired laser output light at high power and photon energy levels. A method and inspection system incorporating the laser assembly is also described.
Public/Granted literature
- US20220107544A1 Frequency Conversion Using Stacked Strontium Tetraborate Plates Public/Granted day:2022-04-07
Information query