- Patent Title: Integrated thin film resistor and metal-insulator-metal capacitor
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Application No.: US17062292Application Date: 2020-10-02
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Publication No.: US11545486B2Publication Date: 2023-01-03
- Inventor: Chengang Feng , Yanxia Shao , Yudi Setiawan , Handoko Linewih , Xuesong Rao
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L49/02

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to an integrated thin film resistor with a metal-insulator-metal capacitor and methods of manufacture. The structure includes: a first buffer contact on a substrate; a second buffer contact on the substrate, the second buffer contact being on a same wiring level as the first buffer contact; a resistive film contacting the first buffer contact and the second buffer contact, the resistive film extending on the substrate between the first buffer contact and the second buffer contact; and electrical contacts landing on both the first buffer contact and the second buffer contact, but not directly contacting with the resistive film.
Public/Granted literature
- US20220108980A1 INTEGRATED THIN FILM RESISTOR AND METAL-INSULATOR-METAL CAPACITOR Public/Granted day:2022-04-07
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