Invention Grant
- Patent Title: Method and apparatus for aligning a probe for scanning probe microscopy to the tip of a pointed sample
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Application No.: US17414207Application Date: 2019-09-23
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Publication No.: US11549963B2Publication Date: 2023-01-10
- Inventor: Kristof Paredis , Jonathan Op de Beeck , Claudia Fleischmann , Wilfried Vandervorst
- Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
- Applicant Address: BE Leuven; BE Leuven
- Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee Address: BE Leuven; BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18214398 20181220
- International Application: PCT/EP2019/075506 WO 20190923
- International Announcement: WO2020/126136 WO 20200625
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q20/02 ; G01Q60/54

Abstract:
Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.
Public/Granted literature
- US20220065895A1 Method and Apparatus for Aligning a Probe for Scanning Probe Microscopy to the Tip of a Pointed Sample Public/Granted day:2022-03-03
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