- 专利标题: Apparatus and method of manufacturing solder bump
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申请号: US17012624申请日: 2020-09-04
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公开(公告)号: US11551944B2公开(公告)日: 2023-01-10
- 发明人: Sungyong Yun , Sanghoon Lee , Sungil Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2019-0110771 20190906
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L23/00
摘要:
An apparatus for forming a solder bump on a substrate including a supporter configured to support the substrate to be provided thereon, a housing surrounding the supporter, a cover defining a manufacturing space in combination with the housing and including an edge heating zone along a perimeter thereof, the manufacturing space surrounding the supporter, and an oxide remover supply nozzle configured to supply an oxide remover to the manufacturing space may be provided.
公开/授权文献
- US20210074560A1 APPARATUS AND METHOD OF MANUFACTURING SOLDER BUMP 公开/授权日:2021-03-11
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