Invention Grant
- Patent Title: Semiconductor device including memory cell and fin arrangements
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Application No.: US17035438Application Date: 2020-09-28
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Publication No.: US11552085B2Publication Date: 2023-01-10
- Inventor: You-Cheng Xiao , Jhih-Siang Hu , Ru-Yu Wang , Jung-Hsuan Chen , Ting-Wei Chiang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/528

Abstract:
A semiconductor device includes at least one memory cell and at least one logic cell. The at least one logic cell is disposed next to the at least one memory cell and includes a plurality of fins. The plurality of fins are separated into a plurality of fin groups for forming transistors. A distance between two adjacent groups of the plurality of fin groups is different from a distance between another two adjacent groups of the plurality of fin groups. A method is also disclosed herein.
Public/Granted literature
- US20220102363A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-03-31
Information query
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