- 专利标题: High-voltage devices integrated on semiconductor-on-insulator substrate
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申请号: US16876098申请日: 2020-05-17
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公开(公告)号: US11552192B2公开(公告)日: 2023-01-10
- 发明人: Ruchil Kumar Jain , Alban Zaka
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理商 Anthony Canale
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/762 ; H01L29/66
摘要:
The present disclosure generally to semiconductor devices, and more particularly to semiconductor devices having high-voltage transistors integrated on a semiconductor-on-insulator substrate and methods of forming the same. The present disclosure provides a semiconductor device including a bulk substrate, a semiconductor layer above the bulk substrate, an insulating layer between the semiconductor layer and the bulk substrate, a source region and a drain region on the bulk substrate, a gate dielectric between the source region and the drain region, the gate dielectric having a first portion on the bulk substrate and a second portion on the semiconductor layer, and a gate electrode above the gate dielectric.
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