- 专利标题： Optical waveguide type photodetector
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申请号： US17188393申请日： 2021-03-01
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公开(公告)号： US11552206B2公开(公告)日： 2023-01-10
- 发明人: Yoshihiro Yoneda , Takuya Okimoto
- 申请人： SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- 申请人地址： JP Kanagawa
- 专利权人： SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- 当前专利权人： SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.
- 当前专利权人地址： JP Kanagawa
- 代理机构： Smith, Gambrell & Russell, LLP.
- 优先权： JPJP2020-035029 20200302
- 主分类号： H01L31/102
- IPC分类号： H01L31/102 ; H01L31/0232 ; H01L31/109 ; H01L31/0304
摘要：
An optical waveguide type photodetector includes a first semiconductor layer of a first conductive type, a multiplication layer of a first conductive type on the first semiconductor layer, an optical waveguide structure, and a photodiode structure. The photodiode structure has a third semiconductor layer of a second conductive type, an optical absorption layer of an intrinsic conductive type or of a second conductive type, and a second semiconductor layer of a second conductive type. The optical waveguide structure includes an optical waveguiding core layer and a cladding layer. An end face of the photodiode structure located in a second region of the first semiconductor layer and an end face of the optical waveguide structure located in a first region of the first semiconductor layer are in contact.
公开/授权文献
- US20210273122A1 OPTICAL WAVEGUIDE TYPE PHOTODETECTOR 公开/授权日：2021-09-02
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