Invention Grant
- Patent Title: Stage apparatus and method for calibrating an object loading process
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Application No.: US17269328Application Date: 2019-07-22
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Publication No.: US11556064B2Publication Date: 2023-01-17
- Inventor: Gijs Kramer , Theodorus Marcus Nagtegaal , André Schreuder , Anna Catharina Verkaik
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP18190476 20180823
- International Application: PCT/EP2019/069685 WO 20190722
- International Announcement: WO2020/038677 WO 20200227
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The invention provides a stage apparatus, comprising an object support comprising a ring shaped protrusion having an outer radius in a first plane, and configured to support an object with a radius in the first plane larger than the outer radius of the ring shaped protrusion. The stage apparatus further comprises a sensor module configured to detect the object support, and the object when it is arranged on the object support. The stage apparatus further comprises a processing unit configured to receive one or more signals from the sensor module, and to determine, based on said one or more signals, a position of the object relative to the ring shaped protrusion when the object is arranged on the object support. The processing unit is further configured to determine, based on said position of the object, an offset value representing the position of the object relative to the ring shaped protrusion.
Public/Granted literature
- US20210311403A1 STAGE APPARATUS AND METHOD FOR CALIBRATING AN OBJECT LOADING PROCESS Public/Granted day:2021-10-07
Information query
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