- 专利标题： Laminated substrate having piezoelectric film, element having piezoelectric film and method for manufacturing this laminated substrate
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申请号： US16628524申请日： 2018-06-22
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公开(公告)号： US11557713B2公开(公告)日： 2023-01-17
- 发明人: Kenji Shibata , Kazutoshi Watanabe , Fumimasa Horikiri
- 申请人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址： JP Tokyo
- 专利权人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人： SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址： JP Tokyo
- 代理机构： Foley & Lardner LLP
- 优先权： JPJP2017-136447 20170712
- 国际申请： PCT/JP2018/023864 WO 20180622
- 国际公布： WO2019/012960 WO 20190117
- 主分类号： H01L41/187
- IPC分类号： H01L41/187 ; H01L41/08 ; H01L41/27
摘要：
There is provided a laminated substrate having a piezoelectric film, including: a substrate; and a piezoelectric film provided on the substrate interposing a base film, wherein the piezoelectric film has an alkali niobium oxide based perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0