- 专利标题: Laminated substrate having piezoelectric film, element having piezoelectric film and method for manufacturing this laminated substrate
-
申请号: US16628524申请日: 2018-06-22
-
公开(公告)号: US11557713B2公开(公告)日: 2023-01-17
- 发明人: Kenji Shibata , Kazutoshi Watanabe , Fumimasa Horikiri
- 申请人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JPJP2017-136447 20170712
- 国际申请: PCT/JP2018/023864 WO 20180622
- 国际公布: WO2019/012960 WO 20190117
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; H01L41/08 ; H01L41/27
摘要:
There is provided a laminated substrate having a piezoelectric film, including: a substrate; and a piezoelectric film provided on the substrate interposing a base film, wherein the piezoelectric film has an alkali niobium oxide based perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0