Invention Grant
- Patent Title: Method for manufacturing display apparatus
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Application No.: US17030977Application Date: 2020-09-24
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Publication No.: US11563040B2Publication Date: 2023-01-24
- Inventor: Jongoh Seo , Gyungmin Baek , Byungsoo So
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2020-0033305 20200318
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/66 ; H01L21/02 ; H01L27/32

Abstract:
A manufacturing method of a display apparatus including preparing a substrate, forming an amorphous silicon layer on the substrate, cleaning the amorphous silicon layer with hydrofluoric acid, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and forming a metal layer directly on the polycrystalline silicon layer.
Public/Granted literature
- US20210296374A1 METHOD FOR MANUFACTURING DISPLAY APPARATUS Public/Granted day:2021-09-23
Information query
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