Invention Grant
- Patent Title: Single bodied platen housing a detection module for CMP systems
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Application No.: US16672099Application Date: 2019-11-01
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Publication No.: US11571782B2Publication Date: 2023-02-07
- Inventor: Tsung-Lung Lai , Cheng-Ping Chen , Shih-Chung Chen , Sheng-Tai Peng , Rong-Long Hung
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group LLP
- Main IPC: B24B37/16
- IPC: B24B37/16 ; B24B49/12 ; B24B37/013

Abstract:
The present disclosure provides a chemical mechanical polishing system having a unitary platen. The platen includes one or more recesses within the platen to house various components for the polishing/planarization process. In one embodiment, the platen includes a first recess and a second recess. The first recess is located under the second recess. An end point detector is placed in the first recess and a detector cover may be placed in the second recess. A sealing mean is provided in a space between the end point detector and the detector cover to prevent any external or foreign materials from coming in contact with the end point detector. A fastener used for fastening the detector cover to the platen also provides addition protection to prevent foreign materials from coming in contact with components received in the recesses.
Public/Granted literature
- US20200164481A1 SINGLE BODIED PLATEN HOUSING A DETECTION MODULE FOR CMP SYSTEMS Public/Granted day:2020-05-28
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