- 专利标题: Addressing layout retargeting shortfalls
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申请号: US16779179申请日: 2020-01-31
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公开(公告)号: US11574103B2公开(公告)日: 2023-02-07
- 发明人: Dongbing Shao , Rasit Onur Topaloglu , Geng Han , Yuping Cui
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Otterstedt & Kammer PLLC
- 代理商 Samuel Waldbaum
- 主分类号: G06F30/392
- IPC分类号: G06F30/392 ; G06F30/398 ; G06F119/18
摘要:
Aspects of the invention provide means for addressing layout retargeting shortfalls. Initially, an original design shape in the layout is allowed to be simulated by process simulation to form process simulation contours. A polygon is then fitted to the process simulation contours to form a fitted simulated shape. Subsequently, whether the fitted simulated shape differs from the original design shape is detected. The process simulation may reflect the changes to the layout that occur at a foundry as part of a retargeting process. Advantageously, addressing a layout for retargeting shortfalls in accordance with aspects of the invention is likely to result in manufactured semiconductor devices having higher yields and reliability than those produced from a like layout that is not addressed in this manner.
公开/授权文献
- US20210240899A1 ADDRESSING LAYOUT RETARGETING SHORTFALLS 公开/授权日:2021-08-05
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