Inspection method of examination system and examination system
Abstract:
An inspection method to be used to inspect an examination system configured to image an object and make a good/defective determination of the object on the basis of an image acquired by the imaging comprises displaying a sample image of the object, imaging the displayed sample image by a camera, and making a good/defective determination of the object indicated by the sample image on, the basis of the image acquired by imaging of the camera.
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