Inductor and method of making an inductor
Abstract:
An inductor and a method of making an inductor. The inductor includes a stack of dielectric layers. The inductor also includes a plurality of metal levels comprising patterned metallic features of the inductor. Each metal level is located at an interface between adjacent dielectric layers in the stack. The patterned metallic features include a first plurality of inductor windings arranged in a substantially flat spiral in one of the metal levels. The patterned metallic features also include a second plurality of inductor windings in which each winding is located in a respective one of the plurality of metal levels. The first plurality of windings is connected in series with the second plurality of windings.
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