Invention Grant
- Patent Title: N-ZnO/N-GaN/N-ZnO heterojunction-based bidirectional ultraviolet light-emitting diode and preparation method therefor
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Application No.: US17606221Application Date: 2019-05-29
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Publication No.: US11575066B2Publication Date: 2023-02-07
- Inventor: Chunxiang Xu , Wei Liu , Zengliang Shi , Zhuxin Li
- Applicant: SOUTHEAST UNIVERSITY
- Applicant Address: CN Nanjing
- Assignee: SOUTHEAST UNIVERSITY
- Current Assignee: SOUTHEAST UNIVERSITY
- Current Assignee Address: CN Nanjing
- Agency: Treasure IP group, LLC
- Priority: CN201910338046.7 20190425
- International Application: PCT/CN2019/089066 WO 20190529
- International Announcement: WO2020/215441 WO 20201029
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L21/66 ; H01L33/56

Abstract:
The present invention discloses a bidirectional ultraviolet light emitting diode (UV LED) based on N—ZnO/N—GaN/N—ZnO heterojunction as well as its preparation method. The LED includes: N—ZnO microwires, a N—GaN film, a PMMA protective layer and alloy electrodes; and its preparation method includes the following steps: lay two N—ZnO microwires on the N—GaN film, then spin-coat a PMMA protective layer on the film to fix the N—ZnO microwires until the PMMA protective layer spreads over the N—ZnO microwires, and then place the film on a drying table to solidify the PMMA protective layer; then etch the PMMA protective layer with O2 to expose the N—ZnO microwires, and prepare alloy electrodes on different N—ZnO microwires to construct a N—ZnO/N—GaN/N—ZnO heterojunction to constitute a complete device. The present invention constructs an N/N/N symmetrical structure; the device is composed of N—ZnO and N—GaN, emits light in the ultraviolet region and has a small turn-on voltage.
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