Invention Grant
- Patent Title: Resonator device, resonator module, electronic apparatus, and vehicle
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Application No.: US16776659Application Date: 2020-01-30
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Publication No.: US11575361B2Publication Date: 2023-02-07
- Inventor: Masahiro Fujii , Ryuichi Kurosawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2019-016275 20190131
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/10 ; H01L41/053
Abstract:
A resonator device includes a base substrate that is formed of a single crystal semiconductor and includes a first surface, a resonator element attached to the first surface of the base substrate, and a cover that is bonded to the first surface of the base substrate, accommodates the resonator element between the cover and the base substrate, and is formed of a single crystal semiconductor. The base substrate and the cover are bonded through an amorphous layer.
Public/Granted literature
- US20200252047A1 RESONATOR DEVICE, RESONATOR MODULE, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2020-08-06
Information query
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