- 专利标题: Arc source with confined magnetic field
-
申请号: US16753565申请日: 2018-10-04
-
公开(公告)号: US11578401B2公开(公告)日: 2023-02-14
- 发明人: Siegfried Krassnitzer , Juerg Hagmann
- 申请人: Oerlikon Surface Solutions AG, Pfäffikon
- 申请人地址: CH Pfäffikon
- 专利权人: Oerlikon Surface Solutions AG, Pfäffikon
- 当前专利权人: Oerlikon Surface Solutions AG, Pfäffikon
- 当前专利权人地址: CH Pfäffikon
- 国际申请: PCT/EP2018/000459 WO 20181004
- 国际公布: WO2019/081052 WO 20190502
- 主分类号: C23C14/32
- IPC分类号: C23C14/32 ; C23C14/06 ; C23C14/24 ; C23C14/54 ; H01J37/32
摘要:
An ARC evaporator comprising: a cathode assembly comprising a cooling plate (11), a target (1) as cathode element, an electrode arranged for enabling that an arc between the electrode and the front surface (1A) of the target (1) can be established—a magnetic guidance system placed in front of the back surface (1 B) of the target (i) comprising means for generating one or more magnetic whereas: —the borders of the cathode assembly comprise a surrounding shield (15) made of ferromagnetic material, wherein the surrounding shield (15) has a total height (H) in the transversal direction, said total height (H) including a component (C) for causing a shielding effect of magnetic field lines extending in any longitudinal directions, establishing in this manner the borders of the cathode assembly as limit of the extension of the magnetic field lines in any longitudinal direction.
公开/授权文献
- US20200299824A1 ARC SOURCE WITH CONFINED MAGNETIC FIELD 公开/授权日:2020-09-24
信息查询
IPC分类: