Invention Grant
- Patent Title: Electrochemical imprinting of micro- and nano-structures in porous silicon, silicon, and other semiconductors
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Application No.: US17517952Application Date: 2021-11-03
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Publication No.: US11579524B2Publication Date: 2023-02-14
- Inventor: Keng Hsu , Placid Ferreira , Bruno Azeredo
- Applicant: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY , THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Applicant Address: US AZ Scottsdale; US IL Urbana
- Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY,THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Current Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY,THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Current Assignee Address: US AZ Scottsdale; US IL Urbana
- Agency: Michael Best & Friedrich LLP
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/027 ; H01L21/3063
Abstract:
An imprinting platform including a noble metal catalyst, a semiconductor substrate, and a pre-patterned polymer stamp, where the catalyst is attached to the stamp, and related methods and articles.
Public/Granted literature
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