Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
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Application No.: US17101401Application Date: 2020-11-23
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Publication No.: US11581331B2Publication Date: 2023-02-14
- Inventor: Hyo Joon Ryu , Young Hwan Son , Seo-Goo Kang , Jung Hoon Jun , Kohji Kanamori , Jee Hoon Han
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2020-0041461 20200406
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/535 ; H01L27/11573 ; H01L27/11529 ; H01L27/11556

Abstract:
A semiconductor memory includes metallic lines on a substrate and including an uppermost metallic line, a semiconductor conduction line on the uppermost metallic line, a vertical structure penetrating the semiconductor conduction line and metallic lines, and including a vertical structure that includes an upper channel film, a first lower channel film, and an upper connection channel film connecting the upper channel film and the first lower channel film between a bottom of the semiconductor conduction line and a bottom of the uppermost metallic line, and a first cutting line through the metallic lines and the semiconductor conduction line, and including a first upper cutting line through the semiconductor conduction line, and a first lower cutting line through the plurality of metallic lines, a width of the first upper cutting line being greater than a width of an extension line of a sidewall of the first lower cutting line.
Public/Granted literature
- US20210313344A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-10-07
Information query
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