Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices
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Application No.: US16412875Application Date: 2019-05-15
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Publication No.: US11587940B2Publication Date: 2023-02-21
- Inventor: Seokcheon Baek , Geunwon Lim , Jaehoon Shin , Myungkeun Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0120033 20181008
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L29/792 ; H01L27/11582

Abstract:
Disclosed is a three-dimensional semiconductor memory device comprising a peripheral circuit structure on a first substrate, a second substrate on the peripheral circuit structure, first to fourth stack structures spaced apart in a first direction on the second substrate, first and second support connectors between the second and third stack structures, third and fourth support connectors between the third and fourth stack structures, and a through dielectric pattern penetrating the first stack structure and the second substrate. A first distance between the first and second support connectors is different from a second distance between the third and fourth support connectors.
Information query
IPC分类: