Invention Grant
- Patent Title: Organic vapor jet print head for depositing thin film features with high thickness uniformity
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Application No.: US16245554Application Date: 2019-01-11
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Publication No.: US11588140B2Publication Date: 2023-02-21
- Inventor: Gregory McGraw , William E. Quinn , Gregg Kottas , Matthew King , Benjamin Swedlove , Tomasz Trojacki
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44 ; H01L51/56 ; H01L51/00
Abstract:
Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
Public/Granted literature
- US20190221783A1 Organic vapor jet print head for depositing thin film features with high thickness uniformity Public/Granted day:2019-07-18
Information query
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