Invention Grant
- Patent Title: Connecting device for inspection
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Application No.: US17392214Application Date: 2021-08-02
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Publication No.: US11592402B2Publication Date: 2023-02-28
- Inventor: Minoru Sato
- Applicant: Kabushiki Kaisha Nihon Micronics
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee Address: JP Tokyo
- Agency: Lorenz & Kopf, LLP
- Priority: JPJP2020-131467 20200803
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; H01L21/66

Abstract:
A connecting device for inspection includes optical probes, and a probe head including a plurality of guide plates. The probe head includes a first guide plate, and a second guide plate arranged movably with respect to the first guide plate in a radial direction of the penetration holes in a state in which the optical probes are inserted to the respective penetration holes. The probe head holds the optical probes by inner wall surfaces of the penetration holes of the first guide plate and inner wall surfaces of the penetration holes of the second guide plate in a state in which the positions of the central axes of the penetration holes of the first guide plate are shifted in the radial direction from the positions of the central axes of the penetration holes of the second guide plate.
Public/Granted literature
- US20220034821A1 CONNECTING DEVICE FOR INSPECTION Public/Granted day:2022-02-03
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