Invention Grant
- Patent Title: 3-d dram cell with mechanical stability
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Application No.: US17354254Application Date: 2021-06-22
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Publication No.: US11594537B2Publication Date: 2023-02-28
- Inventor: Chang Seok Kang , Tomohiko Kitajima
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
Described are memory devices having stacked DRAM cells, resulting in an increase in DRAM cell bit-density. The area of a unit cell is composed of a capacitor, a cell transistor, an isolation region and a connection region, where every capacitor and active region for the cell capacitor is electrically isolated. The memory cells have supporting bars. Methods of forming a memory device are described. The methods include patterning the isolation region with supporting bars, removing non-insulator layers after isolation region patterning, and filling the opened region with an insulator.
Public/Granted literature
- US20220005810A1 3-D DRAM CELL WITH MECHANICAL STABILITY Public/Granted day:2022-01-06
Information query
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