3-d dram cell with mechanical stability
Abstract:
Described are memory devices having stacked DRAM cells, resulting in an increase in DRAM cell bit-density. The area of a unit cell is composed of a capacitor, a cell transistor, an isolation region and a connection region, where every capacitor and active region for the cell capacitor is electrically isolated. The memory cells have supporting bars. Methods of forming a memory device are described. The methods include patterning the isolation region with supporting bars, removing non-insulator layers after isolation region patterning, and filling the opened region with an insulator.
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