Invention Grant
- Patent Title: Resonator, linear accelerator configuration and ion implantation system having toroidal resonator
-
Application No.: US17108747Application Date: 2020-12-01
-
Publication No.: US11596051B2Publication Date: 2023-02-28
- Inventor: Costel Biloiu , Charles T. Carlson , Frank Sinclair , Paul J. Murphy , David T. Blahnik
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDB Firm PLLC
- Main IPC: H05H7/22
- IPC: H05H7/22 ; H01J37/317

Abstract:
An apparatus may include a drift tube assembly, arranged to transmit an ion beam. The drift tube assembly may include a first ground electrode; an RF drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the RF drift tube assembly. The RF drift tube assembly may define a triple gap configuration. The apparatus may include a resonator, where the resonator comprises a toroidal coil, having a first end, connected to a first RF drift tube of the RF drift tube assembly, and a second end, connected to a second RF drift tube of the RF drift tube assembly.
Public/Granted literature
- US20220174810A1 RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SYSTEM HAVING TOROIDAL RESONATOR Public/Granted day:2022-06-02
Information query
IPC分类: