- Patent Title: Organic vapor jet print head with redundant groups of depositors
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Application No.: US17407204Application Date: 2021-08-20
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Publication No.: US11600777B2Publication Date: 2023-03-07
- Inventor: William E. Quinn , Gregory McGraw , Gregg Kottas , Xin Xu , Julia J. Brown
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00 ; B05B12/18 ; H01L51/50

Abstract:
Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.
Public/Granted literature
- US20210384429A1 ORGANIC VAPOR JET PRINT HEAD WITH REDUNDANT GROUPS OF DEPOSITORS Public/Granted day:2021-12-09
Information query
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