Invention Grant
- Patent Title: Polygon mirror and mems interconnect with multiple turns
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Application No.: US16830012Application Date: 2020-03-25
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Publication No.: US11604263B2Publication Date: 2023-03-14
- Inventor: Ronen Eshel , Michael Girgel
- Applicant: INNOVIZ TECHNOLOGIES LTD
- Applicant Address: IL Rosh Ha'Ayin
- Assignee: INNOVIZ TECHNOLOGIES LTD
- Current Assignee: INNOVIZ TECHNOLOGIES LTD
- Current Assignee Address: IL Rosh Ha'Ayin
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: G01S7/00
- IPC: G01S7/00 ; G01S7/481 ; G01S17/931 ; G01H1/00 ; G01S17/10 ; G01S7/4863 ; G01S7/4914 ; G01S17/32 ; G01S17/58 ; G01S7/48 ; G01S7/484 ; G01S7/4911 ; G01S17/42 ; B81B3/00 ; B60S1/02 ; G01S7/497 ; G01S17/06 ; G01S17/89 ; G02B26/12

Abstract:
A MEMS scanning device may include: a movable MEMS mirror configured to pivot about at least one axis; at least one actuator operable to rotate the MEMS mirror about the at least one axis, each actuator out of the at least one actuator operable to bend upon actuation to move the MEMS mirror; and at least one flexible interconnect element coupled between the at least one actuator and the MEMS mirror for transferring a pulling force of the bending of the at least one actuator to the MEMS mirror. Each flexible interconnect element out of the at least one interconnect element may be an elongated structure comprising at least two turns at opposing directions, each turn greater than 120°.
Public/Granted literature
- US20200292709A1 POLYGON MIRROR AND MEMS INTERCONNECT WITH MULTIPLE TURNS Public/Granted day:2020-09-17
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