Invention Grant
- Patent Title: Bidirectional switch element
-
Application No.: US17256475Application Date: 2019-06-12
-
Publication No.: US11605715B2Publication Date: 2023-03-14
- Inventor: Masanori Nomura , Hiroaki Ueno , Yusuke Kinoshita , Yasuhiro Yamada , Hidetoshi Ishida
- Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2018-125452 20180629
- International Application: PCT/JP2019/023188 WO 20190612
- International Announcement: WO2020/004021 WO 20200102
- Main IPC: H01L29/20
- IPC: H01L29/20 ; H01L29/43 ; H01L29/778 ; H01L29/808

Abstract:
A bidirectional switch element includes: a substrate; an AlzGa1-zN layer; an AlbGa1-bN layer; a first source electrode; a first gate electrode; a second gate electrode; a second source electrode; a p-type Alx1Ga1-x1N layer; a p-type Alx2Ga1-x2N layer; an AlyGa1-yN layer; and an AlwGa1-wN layer. The AlzGa1-zN layer is formed over the substrate. The AlbGa1-bN layer is formed on the AlzGa1-zN layer. The AlyGa1-yN layer is interposed between the substrate and the AlzGa1-zN layer. The AlwGa1-wN layer is interposed between the substrate and the AlyGa1-yN layer and has a higher C concentration than the AlyGa1-yN layer.
Public/Granted literature
- US20210134963A1 BIDIRECTIONAL SWITCH ELEMENT Public/Granted day:2021-05-06
Information query
IPC分类: