Invention Grant
- Patent Title: Methods for making three-dimensional module
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Application No.: US17539040Application Date: 2021-11-30
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Publication No.: US11616030B2Publication Date: 2023-03-28
- Inventor: Guobiao Zhang , Hongyu Yu , Shengming Zhou , Yuejin Guo , Kai Chen , Yida Li , Jun Lan
- Applicant: Southern University of Science and Technology
- Applicant Address: CN ShenZhen
- Assignee: Southern University of Science and Technology
- Current Assignee: Southern University of Science and Technology
- Current Assignee Address: CN ShenZhen
- Agency: United States Research and Patent Firm
- Agent George G. Wang
- Priority: CN201910619802.3 20190710
- Main IPC: H01L23/64
- IPC: H01L23/64 ; H01L21/48 ; H01L21/683 ; H01L23/538 ; H01L49/02

Abstract:
A method for making a three-dimensional (3-D) module includes the steps of: A) forming a laminate of alternate ceramic tape layers and internal electrode layers on a substrate; B) etching said laminate to form first and second capacitor stacks at said first and second locations; C) firing said first and second capacitor stacks integrally; D) forming first and second pairs of external electrodes on said first and second capacitor stacks, respectively.
Public/Granted literature
- US20220084961A1 Methods for Making Three-Dimensional Module Public/Granted day:2022-03-17
Information query
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